Mathematical analysis of partial differential equations modeling electrostatic MEMS - Providence, R.I. : American Mathematical Society, 2010. - 1 online resource (xiii, 318 p. : ill.) - Courant Lecture Notes, v. 20 2472-4467 ; .

Includes bibliographical references (p. 309-215) and index.

9781470417635 (online)


Mathematical analysis.
Microelectromechanical systems