TY  - BOOK
AU  - Lars Rebohle, Wolfgang Skorupa
TI  - Rare-Earth Implanted MOS Devices for Silicon Photonics
SN  - 9783642144479
PY  - 2010///
PB  - Springer Berlin Heidelberg
KW  - Physics and Astronomy
UR  - https://doi.org/10.1007/978-3-642-14447-9
ER  -