TY - BOOK AU - Vadim P. Veiko, Vitaly I. Konov TI - Fundamentals of Laser-Assisted Micro- and Nanotechnologies SN - 9783319059877 PY - 2014/// PB - Springer International Publishing KW - Physics and Astronomy UR - https://doi.org/10.1007/978-3-319-05987-7 ER -