TY  - BOOK
AU  - Koji Sugioka, Michel Meunier, Alberto Piqué
TI  - Laser Precision Microfabrication
SN  - 9783642105234
PY  - 2010///
PB  - Springer Berlin Heidelberg
KW  - Physics and Astronomy
UR  - https://doi.org/10.1007/978-3-642-10523-4
ER  -