TY  - BOOK
AU  - Rainer Behrisch, Wolfgang Eckstein
TI  - Sputtering by Particle Bombardment
SN  - 9783540445029
PY  - 2007///
PB  - Springer Berlin Heidelberg
KW  - Physics and Astronomy
UR  - https://doi.org/10.1007/978-3-540-44502-9
ER  -