TY  - DATA
AU  - R. Behrisch
TI  - Sputtering by Particle Bombardment I
SN  - 9783540385141
PY  - 1981///
PB  - Springer Berlin Heidelberg
KW  - Physics and Astronomy
UR  - https://doi.org/10.1007/3-540-10521-2
ER  -