TY  - DATA
AU  - R. Behrisch
TI  - Sputtering by Particle Bombardment II
SN  - 9783540386599
PY  - 1983///
PB  - Springer Berlin Heidelberg
KW  - Physics and Astronomy
UR  - https://doi.org/10.1007/3-540-12593-0
ER  -