TY  - DATA
AU  - Rainer Behrisch, Klaus Wittmaack
TI  - Sputtering by Particle Bombardment III
SN  - 9783540468813
PY  - 1991///
PB  - Springer Berlin Heidelberg
KW  - Physics and Astronomy
UR  - https://doi.org/10.1007/3-540-53428-8
ER  -