TY  - DATA
AU  - Chris R. Kleijn, Christoph Werner
TI  - Modeling of Chemical Vapor Deposition of Tungsten Films
SN  - 9783034877411
PY  - 1993///
PB  - Birkhäuser Basel
KW  - Mathematics and Statistics
UR  - https://doi.org/10.1007/978-3-0348-7741-1
ER  -