000 00369nam a2200133Ia 4500
008 230130s9999||||xx |||||||||||||| ||und||
020 _a9780387233130
100 _aLucille A. Giannuzzi,
245 0 _aIntroduction to Focused Ion Beams
250 _a2005
260 _bSpringer US
_c2005
650 _aPhysics and Astronomy
856 _uhttps://doi.org/10.1007/b101190
999 _c13975
_d13975