000			00543nam a2200145Ia 4500
008			230130s9999||||xx |||||||||||||| ||und||
020			_a9789048138074
100			_aEvgeni Gusev, Eric Garfunkel, Arthur Dideikin
245		0	_aAdvanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
250			_a2010
260			_bSpringer Netherlands _c2010
440			_aNATO Science for Peace and Security Series B: Physics and Biophysics
650			_aPhysics and Astronomy
856			_uhttps://doi.org/10.1007/978-90-481-3807-4
999			_c15758 _d15758