000			00487nam a2200145Ia 4500
008			230130s9999||||xx |||||||||||||| ||und||
020			_a9783319059877
100			_aVadim P. Veiko, Vitaly I. Konov
245		0	_aFundamentals of Laser-Assisted Micro- and Nanotechnologies
250			_a2014
260			_bSpringer International Publishing _c2014
440			_aSpringer Series in Materials Science
650			_aPhysics and Astronomy
856			_uhttps://doi.org/10.1007/978-3-319-05987-7
999			_c16236 _d16236