| 000 | 00448nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230130s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a9783540445029 | ||
| 100 | _aRainer Behrisch, Wolfgang Eckstein | ||
| 245 | 0 | _aSputtering by Particle Bombardment | |
| 250 | _a2007 | ||
| 260 |
_bSpringer Berlin Heidelberg _c2007 |
||
| 440 | _aTopics in Applied Physics | ||
| 650 | _aPhysics and Astronomy | ||
| 856 | _uhttps://doi.org/10.1007/978-3-540-44502-9 | ||
| 999 |
_c17617 _d17617 |
||