000			00374nam a2200133Ia 4500
008			230130s9999||||xx |||||||||||||| ||und||
020			_a9783030330736
100			_aDeborah Munro
245		0	_aDIY MEMS
250			_a1st ed. 2019
260			_bSpringer International Publishing _c2019
650			_aPhysics and Astronomy
856			_uhttps://doi.org/10.1007/978-3-030-33073-6
999			_c18615 _d18615