| 000 | 00423nmm a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230202s9999||||xx |||||||||||||||||und|| | ||
| 020 | _a9783540385141 | ||
| 100 | _aR. Behrisch | ||
| 245 | 0 | _aSputtering by Particle Bombardment I | |
| 250 | _a1981 | ||
| 260 |
_bSpringer Berlin Heidelberg _c1981 |
||
| 440 | _aTopics in Applied Physics | ||
| 650 | _aPhysics and Astronomy | ||
| 856 | _uhttps://doi.org/10.1007/3-540-10521-2 | ||
| 999 |
_c25723 _d25723 |
||