000			00439nmm a2200145Ia 4500
008			230202s9999||||xx |||||||||||||||||und||
020			_a9783540389675
100			_aLudwig Reimer
245		0	_aScanning Electron Microscopy
250			_a2nd ed. 1998
260			_bSpringer Berlin Heidelberg _c1998
440			_aSpringer Series in Optical Sciences
650			_aPhysics and Astronomy
856			_uhttps://doi.org/10.1007/978-3-540-38967-5
999			_c26439 _d26439