000			00446nmm a2200145Ia 4500
008			230202s9999||||xx |||||||||||||||||und||
020			_a9783540468813
100			_aRainer Behrisch, Klaus Wittmaack
245		0	_aSputtering by Particle Bombardment III
250			_a1991
260			_bSpringer Berlin Heidelberg _c1991
440			_aTopics in Applied Physics
650			_aPhysics and Astronomy
856			_uhttps://doi.org/10.1007/3-540-53428-8
999			_c26742 _d26742