| 000 | 00490nmm a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230125s9999||||xx |||||||||||||||||und|| | ||
| 020 | _a9783034877411 | ||
| 100 | _aChris R. Kleijn, Christoph Werner | ||
| 245 | 0 | _aModeling of Chemical Vapor Deposition of Tungsten Films | |
| 250 | _a1993 | ||
| 260 |
_bBirkhäuser Basel _c1993 |
||
| 440 | _aProgress in Numerical Simulation for Microelectronics | ||
| 650 | _aMathematics and Statistics | ||
| 856 | _uhttps://doi.org/10.1007/978-3-0348-7741-1 | ||
| 999 |
_c7945 _d7945 |
||