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1.
Modeling of Chemical Vapor Deposition of Tungsten Films

by Chris R. Kleijn, Christoph Werner.

Series: Progress in Numerical Simulation for MicroelectronicsEdition: 1993Material type: Computer file Computer file; Format: electronic Publication details: Birkhäuser Basel 1993Online access: Click here to access online Availability: Items available for reference: Accessible Online (1). : Location(s): .

2.
Transport Simulation in Microelectronics

by Alfred Kersch, William J. Morokoff.

Series: Progress in Numerical Simulation for MicroelectronicsEdition: 1995Material type: Computer file Computer file; Format: electronic Publication details: Birkhäuser Basel 1995Online access: Click here to access online Availability: Items available for reference: Accessible Online (1). : Location(s): .